Название: Afm visualization of conductivity and morphology of bcx-film surface obtained by sld method
Авторы и аффилиации: Zinin P.V.
(основной автор / докладчик)
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Bykov A.A.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Romanov R.I.
National Research Nuclear University ‘‘MEPhI’’

Korneeva A.A.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Andreev A.V.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Belykh A.Y.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Krasnoborod'Ko S.Y.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Kukushkin V.A.
Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences

Аннотация: Materials with nonstandard physical properties are widely used in various fields of science and technology, from microelectronics to heavy industrial installations. At one time, international scientific teams carried out mathematical calculations showing that the most promising compounds of B–C structures which, under certain external conditions and concentration ratios, have strong chemical sp2 and sp3 bonds. Such materials are characterized by high hardness, resistance to aggressive media, and conductivity. This work is aimed at the synthesis and study of carbon-containing BCx films. This paper presents the results of measuring a thin BC5 film. The spectral characteristics of the film, data on its layer thickness, conductivity, and composition were obtained by using X-ray, Raman, and photoelectron spectroscopy.
Тип: Журнал
Название журнала: OPTOELECTRONICS, INSTRUMENTATION AND DATA PROCESSING
Том: 60
Страницы: 243-249
Номера тем гос.задания: FFNS-2022-0008.
Ссылка на ЦКП и/или УНУ: имеется
DOI: 10.3103/S8756699024700298
ISSN: 8756-6990
Ссылка на страницу в eLIBRARY: https://www.elibrary.ru/item.asp?id=68542472
eLIBRARY ID: 68542472
Код EDN: UQRPIR
Рекомендуемая библиографическая ссылка: Zinin P.V., Bykov A.A., Romanov R.I., Korneeva A.A., Andreev A.V., Belykh A.Y., Krasnoborod'Ko S.Y., Kukushkin V.A. Afm visualization of conductivity and morphology of bcx-film surface obtained by sld method // OPTOELECTRONICS, INSTRUMENTATION AND DATA PROCESSING. 2024. Vol. 60. P. 243-249. EDN: UQRPIR. DOI: 10.3103/S8756699024700298.